Middlefrequencymagnetronsputtering相关论文
Effects of Ion Source Voltages on the Microstructure and Mechanical Properties of Cr-Al-N/CrN Coatin
...
The deposition,microstructure and performance of high-rate deposited CrN thick coatings by middle fr
CrN thick comings were deposited on silicon (111) by middle-frequency magnetron sputtering system under various paramete......